Using Interactive Tools to teach and understand MEMS. A. Fargas-Marques and R. Costa-Castello Haga clic para cambiar el estilo de título Haga clic para modificar el estilo de texto del patrón Segundo nivel Tercer nivel Cuarto nivel Quinto nivel Using interactive tools to teach and understand MEMS Advances in Control Education 2006 June 20-23, Madrid Application tutorial Andreu Fargas-Marquès Ramon Costa-Castelló Institut d’Organització i Control de Sistemes Polytechnic University of Catalonia (UPC)

Using Interactive Tools to teach and understand MEMS. A. Fargas-Marques and R. Costa-Castello Haga clic para cambiar el estilo de título Haga clic para modificar el estilo de texto del patrón Segundo nivel Tercer nivel Cuarto nivel Quinto nivel Using interactive tools to teach and understand MEMS Advances in Control Education 2006 June 20-23, Madrid General description Parameters of the system Calculated values of the system Variables for the simulation Visualitation pages Sliders to continuosly change the variables of simulation Differernt plots available Available signals Simulation controls

Using Interactive Tools to teach and understand MEMS. A. Fargas-Marques and R. Costa-Castello Haga clic para cambiar el estilo de título Haga clic para modificar el estilo de texto del patrón Segundo nivel Tercer nivel Cuarto nivel Quinto nivel Using interactive tools to teach and understand MEMS Advances in Control Education 2006 June 20-23, Madrid System parameters Mass of the system Spring constant of the system Initial gap between the parallel-plates Length of the parallel plates Thickness of the parallel plates Calculated area of the parallel plates Electrostatic capacitance Mechanical resonant frequency Electrostatically corrected resonant frequency Driving frequency (Hz)

Using Interactive Tools to teach and understand MEMS. A. Fargas-Marques and R. Costa-Castello Haga clic para cambiar el estilo de título Haga clic para modificar el estilo de texto del patrón Segundo nivel Tercer nivel Cuarto nivel Quinto nivel Using interactive tools to teach and understand MEMS Advances in Control Education 2006 June 20-23, Madrid Visualization Schematic visualization with the mass-spring-damper model Real visualization of a beam resonator moving under the driving voltages

Using Interactive Tools to teach and understand MEMS. A. Fargas-Marques and R. Costa-Castello Haga clic para cambiar el estilo de título Haga clic para modificar el estilo de texto del patrón Segundo nivel Tercer nivel Cuarto nivel Quinto nivel Using interactive tools to teach and understand MEMS Advances in Control Education 2006 June 20-23, Madrid Simulation parameters Sliders to dinamically interact with the simulation Dring frequency (rads) Quality factor (damping) Voltage bias Alternating voltage

Using Interactive Tools to teach and understand MEMS. A. Fargas-Marques and R. Costa-Castello Haga clic para cambiar el estilo de título Haga clic para modificar el estilo de texto del patrón Segundo nivel Tercer nivel Cuarto nivel Quinto nivel Using interactive tools to teach and understand MEMS Advances in Control Education 2006 June 20-23, Madrid Driving functions and simulation controls Step function of Vdc value Square function of Vdc + Vac value Sinusoudal function of Vdc + Vac value Closed-loop actuation that drives the system with a s quare function of Vdc + Vac value up to system resonance Begin the simulation Stop the simulation Reset the parameters and simulation to initail values

Using Interactive Tools to teach and understand MEMS. A. Fargas-Marques and R. Costa-Castello Haga clic para cambiar el estilo de título Haga clic para modificar el estilo de texto del patrón Segundo nivel Tercer nivel Cuarto nivel Quinto nivel Using interactive tools to teach and understand MEMS Advances in Control Education 2006 June 20-23, Madrid Available plots (I)

Using Interactive Tools to teach and understand MEMS. A. Fargas-Marques and R. Costa-Castello Haga clic para cambiar el estilo de título Haga clic para modificar el estilo de texto del patrón Segundo nivel Tercer nivel Cuarto nivel Quinto nivel Using interactive tools to teach and understand MEMS Advances in Control Education 2006 June 20-23, Madrid Available plots (II)